Spare Parts for Ceramics and Quartz Used in FAB As Follows：

1. Ceramic Arms Used for Customizing FAB Platform.

2. Silicon carbide chuck for NIKON STEPPER and other FAB EQ.

3. Ceramic RING and lift pin for APPLIED and LAM.

4. Ceramic parts such as ceramic pillars and ceramic pins for EI5Z machine.

5. Ceramic tube, ceramic fork for NOVELLUS C1/C2 machine.

6. Quartz parts needed by APPLIED and LAM machines, such as Shadow ring and cover.

7. Quartz pipe fittings for Lam machine.

8. Quartz frame and boat for LED and FAB.

Please click on the corresponding column under the left [Product Information]